ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,020, issued on Sept. 22, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea). "Apparatus for treating substrate and method for... Read More
ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,021, issued on Sept. 22, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands). "Prolonging optical element lifetime in an EUV li... Read More
ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,022, issued on Sept. 22, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany). "Projection lens, projection exposure apparatus and pr... Read More
ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,024, issued on Sept. 22, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Methods and mechanisms for modifying machine-learn... Read More
ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,025, issued on Sept. 22, was assigned to Onto Innovation Inc. (Wilmington, Mass.). "Substrate edge patterning techniques" was invented by ... Read More
ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,026, issued on Sept. 22, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Gyeonggi-do, South Korea). "Critical dimension inspection method an... Read More
ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,027, issued on Sept. 22, was assigned to KLA Corp. (Milpitas, Calif.). "Methods and systems for model-less, scatterometry based measuremen... Read More
ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,028, issued on Sept. 22, was assigned to GUDENG EQUIPMENT Co. LTD. (New Taipei City, Taiwan). "Reticle clamping module" was invented by Yu... Read More
ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,029, issued on Sept. 22, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Digital photolithography system, components thereo... Read More
ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,030, issued on Sept. 22, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Frequency and amplitude modulation of implant dose... Read More